2. Oxidation.zip
Oxidation is the process of growing a thin layer of silicon dioxide (SiO₂) on the surface of a silicon wafer by exposing it to an oxidizing atmosphere at high temperatures. This SiO₂ layer acts as an essential insulator, mask, or gate dielectric in semiconductor devices.
Reference : https://universe.roboflow.com/license-plate-detection-yolov7/die-detection-jcybg/dataset/1/images
It is important to distinguish between high-quality (good) and defective (not good) oxidation layers, as this step plays a critical role in insulation, masking, and gate dielectric formation in semiconductor devices.
A good oxidation process results in a uniform, defect-free silicon dioxide (SiO₂) layer with well-controlled thickness and excellent electrical properties.
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Smooth, uniform oxide layer across the entire wafer surface
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Consistent color or interference pattern when viewed under optical inspection
Defective oxidation may result in non-uniform thickness, electrical failure, or process integration issues, especially in gate dielectrics or isolation regions.
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Non-uniform oxide thickness
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Pinholes or micro-cracks
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Surface roughness
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| 필드 | 값 |
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